Micro-Pirani Vacuum Sensors

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PVC1000 Series Micro-pirani Vacuum Sensors Description
    Posifas PVC1000 series of MEMS MicroPirani Vacuum Sensors offer a breakthrough vacuum measurement solution that enhances miniaturization while delivering ultra-low power consumption, long lifetime, minimal field maintenance, and low cost.
    Based on the principal that the thermal conductivity of gases is proportional to pressure in the low vacuum range, the Posifa sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas.

PVC1000 Series Micro-pirani Vacuum Sensors Features

• Ultra low power consumption < 5 mW
• Fast Response Time < 5 mSec
• Suitable for gas volume as low as 0.1 cm3
• Long Term Stability
• Can be cleaned by immersing in solvent, prolonging useful life

PVC1000 Series Micro-pirani Vacuum Sensors Applications

• Leak detection in any closed system maintained under primary vacuum
• Vacuum packing machines
• Portable digital vacuum gauges

PVC1000 Series Micro-pirani Vacuum Sensors Absolute Maximum Ratings

• Operating Temperature: -25 to 85 °C
• Storage Temperature: -40 to 90 °C
• Shock: 100 g peak (5 drops, 3 axis)

PVC1000 Series Micro-pirani Vacuum Sensors Electrical Characteristics

Test Conditions: Heating Current = 7mA, Ta=25°C
SPECIFICATIONS	MIN	TYP	MAX	UNIT	CONDITIONS
Range	10-3		30	Torr
Resolution1		0.25		Torr	5-30 Torr
		0.05		Torr	2 to 5 Torr
		0.005		Torr	10-3 to 2 Torr
Accuracy1		±10		% reading	> 5 Torr
		±5		% reading	< 5 Torr
Measurement Resistor (Class 1)	130	160	180	Ohm	At 25°C
Reference Resistor (Class 1)	250	320	370	Ohm	At 25°C
Measurement Resistor (Class 2)	100	120	140	Ohm	At 25°C
Reference Resistor (Class 2)	190	320	290	Ohm	At 25°C
Resistor TCR		0.0025		/°K
Humidity	0		100	%	RH, Non-condensing
Heating Current3		6.5	7.5	mA
Operating Temperature Range	-25		85	°C
Storage Temperature	-40		90	°C
Power Consumption			5	mW	10-3 to 30 Torr
Shock Resistance			1000	g
Overpressure			27.5	Bar
Measurable Gas Volumes		0.1		cm³
Response Time		5		mSec

1 For reference only. Actual resolution/accuracy depends on the associated circuit.

2 For class 1, 6.5mA is recommended. For class 2, 7.3mA