Mass Air Flow Sensor

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PMF4000 Series Mass Air Flow Sensor Description
    PMF4000 features third-generation thermal flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise and repeatability. The solid state thermal isolation structure on the sensor die eliminates the need for surface cavity or fragile membrane used in competing technologies, making the sensor resistant to clogging and pressure shock.
    The PMF4000 series includes the analog output PMF4000V and the digital I²C output PMF4000D.
    The supported max flow rates range from 12 SLM to 300 SLM. The sensors are temperature compensated over the temperature range of 0 to 50 °C. The linearized output provides maximum flexibility and ease-of-use.
 
PMF4000 Series Mass Air Flow Sensor Features

• Unsurpassed performance in a robust and cost effective package
• Solid state sensing core (no surface cavity or fragile membrane) resistant to clogging and pressure shock
• Highly accurate (4% reading typ.)
• Fast response time (5 ms typ.)
• Linear output and temperature compensation
• Long-term stability with minimal null drift
• Wiring harness with pre-installed receptacle

 
PMF4000 Series Mass Air Flow Sensor Applications

• Oxygen concentrators
• Respirators and ventilators
• Nebulizers
• CPAP equipment
• Anesthesia delivery
• Leak detection
• Spectroscopy
• Mass flow controller 

 
PMF4000 Series Mass Air Flow Sensor Maximum Ratings

• Operating Temperature: -25 to 85 °C
• Calibrated Temperature Range: 0 to 50 °C
• Storage Temperature: -40 to 90 °C
• Humidity: 0 to 100% RH, non-condensing
• Shock: 100 g peak (5 drops, 3 axis)
• Operating Pressure: 25 psi

 
PMF4000 Series Mass Air Flow Sensor Specifications

Test Conditions: Vin=10±0.01VDC, Ta=25°C. Relative Humidity: 40%
SPECIFICATIONS	MIN	TYP	MAX	UNIT	CONDITIONS
PMF4003	0		12	SLM
PMF4004	0		20	SLM
PMF4005	0		35	SLM
PMF4100	0		50	SLM
PMF4101	0		100	SLM
PMF4102	0		150	SLM
PMF4103	0		200	SLM
PMF4104	0		300	SLM
PMF4105	0		250	SLM
Output Voltage (V)2	1 to 5			VDC
Null Voltage (V)	0.95	1	1.05	VDC
Output Count (D)	256 to 16124			Count
Null Count	156		356	Count
Null Drif			0.2	% F.S	Per year
Repeatability		0.1		% F.S
Accuracy3		1%		F.S.	0 to 25% F.S.
		4%		Reading	25 to 100% F.S.
Resolution (D)		14		Bit
Response Time4		5		mSec
Supply Voltage (V)	6	10	16	Vdc
Supply Voltage (D)	4.75		16	Vdc
Current		21	26	mA
Wetted Materials	Silicon carbide, epoxy, PPE+PE, FR4, and silicone as static seal

1. SLM: standard liter per minute. Standard conditions: 0 °C and 1 atmosphere.
2. V refers to the analog version of PMF4000, and D refers to the digital I2C version.
3. Maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Errors include offset, full scale span,
linearity, flow hysteresis, repeatability and temperature effects over the compensated temperature range.
4. 10% to 90% rise time of the flow sensor to electrically respond to any mass flow change. May be affected by the pneumatic interface.