PVC1000 Series Micro-pirani Vacuum Sensors Description
Posifas PVC1000 series of MEMS MicroPirani Vacuum Sensors offer a breakthrough vacuum measurement solution that enhances miniaturization while delivering ultra-low power consumption, long lifetime, minimal field maintenance, and low cost.
Based on the principal that the thermal conductivity of gases is proportional to pressure in the low vacuum range, the Posifa sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas.
PVC1000 Series Micro-pirani Vacuum Sensors Features
Test Conditions: Heating Current = 7mA, Ta=25°C | |||||
SPECIFICATIONS | MIN | TYP | MAX | UNIT | CONDITIONS |
Range | 10-3 | 30 | Torr | ||
Resolution1 | 0.25 | Torr | 5-30 Torr | ||
0.05 | Torr | 2 to 5 Torr | |||
0.005 | Torr | 10-3 to 2 Torr | |||
Accuracy1 | ±10 | % reading | > 5 Torr | ||
±5 | % reading | < 5 Torr | |||
Measurement Resistor (Class 1) |
130 | 160 | 180 | Ohm | At 25°C |
Reference Resistor (Class 1) |
250 | 320 | 370 | Ohm | At 25°C |
Measurement Resistor (Class 2) |
100 | 120 | 140 | Ohm | At 25°C |
Reference Resistor (Class 2) |
190 | 320 | 290 | Ohm | At 25°C |
Resistor TCR | 0.0025 | /°K | |||
Humidity | 0 | 100 | % | RH, Non-condensing | |
Heating Current3 | 6.5 | 7.5 | mA | ||
Operating Temperature Range |
-25 | 85 | °C | ||
Storage Temperature | -40 | 90 | °C | ||
Power Consumption | 5 | mW | 10-3 to 30 Torr | ||
Shock Resistance | 1000 | g | |||
Overpressure | 27.5 | Bar | |||
Measurable Gas Volumes | 0.1 | cm³ | |||
Response Time | 5 | mSec |
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