PMF4000 Series Mass Air Flow Sensor Description
PMF4000 features third-generation thermal flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise and repeatability. The solid state thermal isolation structure on the sensor die eliminates the need for surface cavity or fragile membrane used in competing technologies, making the sensor resistant to clogging and pressure shock.
The PMF4000 series includes the analog output PMF4000V and the digital I²C output PMF4000D.
The supported max flow rates range from 12 SLM to 300 SLM. The sensors are temperature compensated over the temperature range of 0 to 50 °C. The linearized output provides maximum flexibility and ease-of-use.
PMF4000 Series Mass Air Flow Sensor Features
| Test Conditions: Vin=10±0.01VDC, Ta=25°C. Relative Humidity: 40% | |||||
| SPECIFICATIONS | MIN | TYP | MAX | UNIT | CONDITIONS |
| PMF4003 | 0 | 12 | SLM | ||
| PMF4004 | 0 | 20 | SLM | ||
| PMF4005 | 0 | 35 | SLM | ||
| PMF4100 | 0 | 50 | SLM | ||
| PMF4101 | 0 | 100 | SLM | ||
| PMF4102 | 0 | 150 | SLM | ||
| PMF4103 | 0 | 200 | SLM | ||
| PMF4104 | 0 | 300 | SLM | ||
| PMF4105 | 0 | 250 | SLM | ||
| Output Voltage (V)2 | 1 to 5 | VDC | |||
| Null Voltage (V) | 0.95 | 1 | 1.05 | VDC | |
| Output Count (D) | 256 to 16124 | Count | |||
| Null Count | 156 | 356 | Count | ||
| Null Drif | 0.2 | % F.S | Per year | ||
| Repeatability | 0.1 | % F.S | |||
| Accuracy3 | 1% | F.S. | 0 to 25% F.S. | ||
| 4% | Reading | 25 to 100% F.S. | |||
| Resolution (D) | 14 | Bit | |||
| Response Time4 | 5 | mSec | |||
| Supply Voltage (V) | 6 | 10 | 16 | Vdc | |
| Supply Voltage (D) | 4.75 | 16 | Vdc | ||
| Current | 21 | 26 | mA | ||
| Wetted Materials | Silicon carbide, epoxy, PPE+PE, FR4, and silicone as static seal | ||||
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