PMF2000 Series Mass Air Flow Sensor Description
PMF2000 features Posifas third-generation thermal flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise, and repeatability. The solid state thermal isolation structure on the sensor die eliminates the need for surface cavity or fragile membrane used in competing technologies, making the sensor resistant to clogging and pressure shock.
The PMF2000 series includes the analog output PMF2000V and the digital I²C output PMF2000D.
The supported max flow rate ranges from 200 sccm to 10 SLM. The sensors are temperature compensated over the temperature range of 0 to 50 °C. The linearized output provides maximum flexibility and ease-of-use.
PMF2000 Series Mass Air Flow Sensor Features
| Test Conditions: Vin=10±0.01VDC, Ta=25°C. Relative Humidity: 40% | |||||
| SPECIFICATIONS | MIN | TYP | MAX | UNIT | CONDITIONS |
| PMF2101 | 0 | 200 | sccm | ||
| PMF2102 | 0 | 1000 | sccm | ||
| PMF2103 | 0 | 2000 | sccm | ||
| PMF2104 | 0 | 3000 | sccm | ||
| PMF2105 | 0 | 4000 | sccm | ||
| PMF2108 | 0 | 10 | SLM | ||
| Output Voltage (V)2 | 1 to 5 | VDC | |||
| Null Voltage (V) | 0.95 | 1 | 1.05 | VDC | |
| Output Count (D) | 256 to 16124 | Count | |||
| Null Count | 156 | 356 | Count | ||
| Null Drif | 0.2 | % F.S. | Per year | ||
| Repeatability | 0.1 | % F.S. | |||
| Accuracy3 | 1% | F.S. | 0 to 25% F.S. | ||
| 4% | Reading | 25 to 100% F.S. | |||
| Resolution (D) | 14 | Bit | |||
| Response Time4 | 5 | mSec | |||
| Supply Voltage (V) | 6 | 10 | 16 | Vdc | |
| Supply Voltage (D) | 4.75 | 10 | 16 | Vdc | |
| Current | 21 | 26 | mA | ||
| Wetted Materials | Silicon carbide, epoxy, PPE+PE, FR4, and silicone as static seal | ||||
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